Industry Sector: Optoelectronics

Application: Vacuum bake out to 300°C of optoelectronic packages.

Description: Cleanroom compatible system consisting of a water cooled stainless steel front loading vacuum chamber with individually heated shelves. Evacuated to better than 5x10-6mbar by 900ls-1 turbomolecular pump, backed by 33m3h-1 rotary vane pump.

Automated PLC control with alpha-numeric display for production batches with manual override facility allowing for research and development projects.