Tylan® Mass Flow Control

About Celerity and WTSL

Celerity Acquires Entegris' Gas Delivery Business
Acquisition enhances Celerity's position as a leading supplier of critical instruments to the semiconductor and other high tech industries.

February 6, 2006 - Celerity, Inc., a leading global provider of gas and chemical delivery solutions to the semiconductor and other high tech industries, announced today that it has acquired the assets of a line of gas delivery products from Minnesota-based Entegris, Inc. The acquisition expands Celerity's portfolio of solutions for its customers and is a key part of the company's growth strategy.

Celerity is a worldwide supplier to the semiconductor industry. The company develops, manufactures and supplies liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify fluids.

Celerity offers an expandable and diverse product line in both filters and gas and liquid delivery systems. The company’s products are used at thousands of points throughout the semiconductor fabrication process. They are also used in the manufacturing processes for a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical and magnetic storage devices and fibre optic cables. Celerity's broad range of products covering consumables, as well as equipment, gives the company a diversified revenue stream.

Some of the new products available are listed below.

IntelliFlow® II Digital Flow Controller      

Advanced digital technology with industry leading configurability

Performance Characteristics. IntelliFlow II is an advanced digital mass flow controller, expanding the attributes of the first generation IntelliFlow product line. Key enhancements for IntelliFlow II include:
• User configurability
• Extension of flow range to 100 slpm (N2 equivalent)
• Advanced electronic, mechanical and software designs

User configurability allows customers to program generic MFCs to virtually any gas and range within select boundaries. In addition to superior performance, user configurability delivers significant cost savings through:
• Inventory reduction
• Reconfiguration efficiency (reduced time, complexity and cost)
• Tool uptime improvements
• Product lead-time compression

Tylan® FC2979M and FM3979M Mass Flow Controllers and Flowmeters

• Eliminates a major source of outgassing and minimising the corrosive effects common with many semiconductor process gases
• Enhanced ability to expel contaminants from the gas delivery system
• Reduces clean-up and installation times
• Assurance that product is ultra-clean
• Low lead current eliminates signal differing from its controlling device
• Automatically resets to zero under no flow conditions, and shifts the entire calibration curve to cancel many effects of temperature coefficients and calibration drift

• Autozero Digital Circuitry
• User-Selectable Response Time Option
• Temperature Coefficients
• Balanced Power Load
• Power Operation
• Standard Design

• Eliminates air convection currents inside its case without sacrificing response speed
• Can be mounted in any position without requiring zero adjustment
• Assures accuracy over the entire range of mass flow controller
• Easily removed for range changes
• Completely compatible with reactive and corrosive materials
• Design eliminates internal dead volumes
• Eliminates the need for complex, interactive multi-point linearisation during calibration

• Can be mounted in any position without requiring zero adjustment
• Assures accuracy over the entire range of mass flow control
• Easily removed for range changes
• Completely compatible with reactive and corrosive materials
• Automatically resets output to zero under no flow conditions, and shifts the entire calibration curve to cancel many effects of temperature coefficients and calibration drift
• Industry standard pin-outs and dimensions made the Tylan FC2920 easy to install in many systems

• Can be mounted in any position without requiring zero adjustment
• Assures accuracy over the entire range of mass flow control
• Completely compatible with reactive and corrosive materials
• Quick response to setpoint command
• Maintains tight control in varying temperature

• Eliminates a major source of outgassing and minimising the corrosive effects common with many semiconductor process gases
• Enhanced ability to expel contaminants from the gas delivery system
• Reduces clean-up and installation times
• Assurance that product is ultra-clean
• Low lead current eliminates signal differing from its controlling device
• Automatically resets to zero under no flow conditions, and shifts the entire calibration curve to cancel many effects of temperature coefficients and calibration drift