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Digital Baratron® Vacuum Gauges  •  Unheated or Heated Versions  •  Full Scale Range 1,000 – 0.1 mbar

i-Baratron® DeviceNet™ Unheated Absolute Gauge
  • Excellent long-term stability
  • Microprocessor-based electronics provide superior accuracy and repeatability
  • Full Scale ranges of 1000 to 1 mbar (Unheated), 1000 to 0.1 mbar (Heated)
  • 100% back-compatible with previous MKS Types DMA and DMB i-Baratron® products
  • Fully-welded Inconel and Incoloy® sensor offers extremely high corrosion resistance from common process gases
  • Standard or etch sensors available
  • High over-pressure specification of 45 psia (3 bar/310 kPa) prevents shifting or permanent calibration changes
  • CE approved and RoHS (Restriction of Hazardous Substances) compliant
  • 4 VCR F, 1/2″ tube, 8VCR F, Mini-CF, DN16KF, DN25KF flange options
e-Baratron® EtherCAT® Temperature Controlled Absolute Gauge
  • Industry-leading accuracy and repeatability
  • Standard product includes both analog and EtherCAT communications
  • Meets current SEMI EtherCAT Device Profiles for vacuum gauges
  • Full Scale measurement ranges from 0.1 to 1000 Torr (13.3 Pa to 133.3 kPa)
  • Inconel-based sensor offers superior corrosion resistance to common process gases
  • Operating temperatures of 45°, 80°, and 100°C
  • Standard or etch sensors available
  • Excellent long-term stability
  • CE and RoHS (Restriction of Hazardous Substances) compliant
  • 1/2″ tube, 8VCR F, DN16KF, DN25KF flange options
627C e-Baratron® Heated Ethernet-Enabled Absolute Gauge
  • Measurement range 1,000, 10, 1 and 0.1 Torr models
  • Both analog and Ethernet communications are compatible with existing and networked process tools
  • Real-time Ethernet communications can be run in parallel with analog communications, for in-situ diagnostics
  • Embedded internet web browser communicates with any Windows®-based PC
  • Graphical User Interface (GUI) for device and process diagnostics
  • 1/2″ tube, 8VCR F, Mini-CF, DN16KF flange options