Digital Baratron® Vacuum Gauges • Unheated or Heated Versions • Full Scale Range 1,000 – 0.1 mbar
i-Baratron® DeviceNet™ Unheated Absolute Gauge
- Excellent long-term stability
- Microprocessor-based electronics provide superior accuracy and repeatability
- Full Scale ranges of 1000 to 1 mbar (Unheated), 1000 to 0.1 mbar (Heated)
- 100% back-compatible with previous MKS Types DMA and DMB i-Baratron® products
- Fully-welded Inconel and Incoloy® sensor offers extremely high corrosion resistance from common process gases
- Standard or etch sensors available
- High over-pressure specification of 45 psia (3 bar/310 kPa) prevents shifting or permanent calibration changes
- CE approved and RoHS (Restriction of Hazardous Substances) compliant
- 4 VCR F, 1/2″ tube, 8VCR F, Mini-CF, DN16KF, DN25KF flange options
e-Baratron® EtherCAT® Temperature Controlled Absolute Gauge
- Industry-leading accuracy and repeatability
- Standard product includes both analog and EtherCAT communications
- Meets current SEMI EtherCAT Device Profiles for vacuum gauges
- Full Scale measurement ranges from 0.1 to 1000 Torr (13.3 Pa to 133.3 kPa)
- Inconel-based sensor offers superior corrosion resistance to common process gases
- Operating temperatures of 45°, 80°, and 100°C
- Standard or etch sensors available
- Excellent long-term stability
- CE and RoHS (Restriction of Hazardous Substances) compliant
- 1/2″ tube, 8VCR F, DN16KF, DN25KF flange options
627C e-Baratron® Heated Ethernet-Enabled Absolute Gauge
- Measurement range 1,000, 10, 1 and 0.1 Torr models
- Both analog and Ethernet communications are compatible with existing and networked process tools
- Real-time Ethernet communications can be run in parallel with analog communications, for in-situ diagnostics
- Embedded internet web browser communicates with any Windows®-based PC
- Graphical User Interface (GUI) for device and process diagnostics
- 1/2″ tube, 8VCR F, Mini-CF, DN16KF flange options